PRODUCTION OF OPTICAL CONTROL DEVICE

摘要

PURPOSE:To provide the process for production of the novel and revolutionary optical control device which can be improved in pattern accuracy and can be drastically decreased in DC drift by buffer layers with simple stages. CONSTITUTION:This process for production of the optical control device by forming control electrode layers 5 via the buffer layers 4 on optical waveguides 2 provided in the surface layer part or on the surface of a substrate 1 having an electrooptical effect consists in laminating a resist layer 3 on the substrate 1 exclusive of at least a part of the regions made to remain on the optical waveguides 2 and successively laminating the buffer layers 4 and the control electrode layers 5 on at least a part of the regions on the optical waveguides 2, then removing the resist layer 3. The buffer layers 4 are formed by executing sputtering in a gaseous atmosphere contg. gaseous oxygen.