| 摘要 |
<p>PURPOSE:To increase a reliability of a fine processing and a size measurement by detecting a state of fixation accurately when fixing a test piece on a sample holder using an electrostatic attraction equipment. CONSTITUTION:This equipment is constituted of a resistor 6 which converts detected current to voltage an amplifier 7 which amplifies the detected voltage, a comparator 8 which compares the detected voltage with a threshold voltage, a pulse width detector 10 which detects a state of attraction, and other devices. Due to this structure, when fixing a test piece on a sample holder using an electrostatic attraction equipment, a state of attraction can be detected accurately even if current flowing steadily in the test piece is too small to detect.</p> |
