PHTHALOCYANINE THIN FILM, MANUFACTURE THEREOF AND MULTILAYER FILM USING THAT

摘要

PURPOSE:To provide a phthalocyanine thin film, having a high degree of freedom of selecting a substrate used and fabricated at high speed, and a multilayer film using the phthalocyanine thin film. CONSTITUTION:A phthalocyanine thin film is made of an amorphous phthalocyanine derivatives, the root-mean-square roughness of the surface of which is 100 Angstroms or shorter and the thin film. This phthalocyanine thin film is formed by a method wherein a substrate is cooled to -25 to -269 deg.C, phthalocyanine derivative molecules are evaporated by heating and the evaporated molecules are made to fly as a molecular beam in an ultrahigh vacuum of less than 1 X 10<-7> Torr. A multilayer film using the phthalocyanine thin film is constituted by two layers or more of the phthalocyanine thin films and the phthalocyanine thin films adjacent to each other respectively consist of different phthalocyanine derivatives.