| 摘要 |
PURPOSE:To obtain a crystal solar cell provided with a window layer effect without using a heterogeneous material by a method wherein porous silicon, of a second conductivity type, to be used as a light-incident layer is laminated on crystal silicon of a first conductivity type. CONSTITUTION:Impurities are introduced into the surface of a silicon wafer by a thermal diffusion operation, an ion implantation operation or the like, and a first crystal silicon layer 101c is formed. Then, the surface on the side into which the impurities have been introduced of the wafer is anodically formed in an HF solution, and a second porous crystal silicon layer 103c is formed. A transparent conductive film 105c and a collector electrode 105a are formed on it, an electrode 106c is formed on the rear and a solar cell is formed. Consequently, the crystal silicon layer 101c and the porous silicon layer 103c of an opposite conductivity type are formed on the surface of crystal silicon, the porous silicon layer 103c functions as a good window layer, and the solar cell whose photoelectric conversion efficiency is high can be manufactured. Consequently, a good-quality crystal solar cell provided with mass productivity can be put on the market. |
