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发明名称
MANUFACTURE OF THIN FILM RESISTANCE ELEMENT
摘要
申请公布号
JPH0645525(A)
申请公布日期
1994.02.18
申请号
JP19920199338
申请日期
1992.07.27
申请人
NEC CORP
发明人
MUKAI KANJI
分类号
H01L27/04;H01L21/822;(IPC1-7):H01L27/04
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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