| 摘要 |
<p>PURPOSE: To increase a field emission current and improve its stability by depositing a coating material on a cathode chip evaporating or sputtering the coating material. CONSTITUTION: A field emitter cathode structural body is supported by a substrate with a cathode chip 1 tapered on the substrate and an insulating spacer layer 7, and is formed with a grid layer which has an aperture substantially located in a coaxial position with the cathode chip 1. And, a thin coating 11 is formed by depositing a coating material on the entire cathode structural body evaporating the coating material from an evaporation source 8. Here, since the aperture 9 in the insulating spacer layer 7 has a larger diameter than the aperture in the grid, etc., the coating material is not deposited on surrounding walls of the aperture 9 in the insulating spacer layer 7. Therefore, when the field emission cathode structural body is used, a short-circuit is not caused between the cathode chip 1 and the grid layer.</p> |
