| 摘要 |
PURPOSE:To provide the waveguide type electrooptical element which can be driven by a low voltage by using a material having excellent moldability and a large electrooptical constant. CONSTITUTION:This waveguide type electrooptical element is constituted by disposing a coplanar line type electrode 3 consisting of a metal on a silicon substrate 1 having a glass layer 2 on its surface, disposing a channel type waveguide layer 6 consisting of a material, which is formed by subjecting a high polymer dissolved or bonded with a material having quadratic optical nonlinear sensitivity of >=500X10<-48>esu betamu value to a polarization treatment, on a central conductor at the center of this electrode 3 and disposing clad layers 4, 7 having the refractive index lower than the refractive index of the waveguide layer 6 above and below the waveguide layer 6. This process for production consists in executing the polarization treatment by parallel electrodes or corona discharge. Then, the high-polymer material which can be easily molded and can be easily polarized by parallel flat plate electrodes or corona electrification and, therefore, light modulation is executed with high efficiency with the low driving voltage. |
