| 摘要 |
PURPOSE:To obtain a photodetector wherein the amount of light of soft X-rays can be measured and, at the same time, an image can be detected by a method wherein the photodetector is provided with an image sensing element whose pixel electrodes for individual pixels have been exposed on its photodetection face and with a mesh-shaped anode electrode which is installed on the front of the pixel electrodes for the image sensing element. CONSTITUTION:A photodetector is composed of an image sensing element 1 whose pixel electrodes 1a connected to capacity structure regions for individual pixels are exposed on its photodetection face and of a wire-mesh-shaped anode electrode 2 installed on the front of the pixel electrodes 1a, and a potential difference is given across the pixel electrodes 1a and the anode electrode 2 by a bias power supply. When soft X-rays are incident, the pixel electrodes 1a emit photoelectrons e<-> and holes are generated inside the electrodes. As the holes are generated, an electric charge whose amount corresponds to the emitted photoelectrons e<->, in other words an electric energy corresponding to the incident energy of the soft X-rays, is accumulated in the capacitor structure regions. As a result, when the amount of the accumulated electric charge is measured, the amount of light of the soft X-rays can be measured.
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