| 摘要 |
<p>PURPOSE:To achieve a more compact piezoelectric element by providing an electrode for a piezoelectric material having a vibration mode in the radial direction. CONSTITUTION:A resist pattern 2' which is obtained by forming a resist layer 2 with polymethylmethacrylate as a material on a substrate 1 and then performing lithography according to synchrotron radiation light has a structure where a plurality of cylindrical bodies are aligned on a base with a specific spacing. Then, a metal structure body 3 is deposited by electrical plating, a gate plate 4 where a number of holes are provided are placed on it and a piezoelectric slurry is allowed to flow to it, and then it is calcined, thus enabling a plurality of piezoelectric ceramic rod-shaped bodies 6 to be bundled on a gate plate 4 at a specific spacing. Thus, a resin 7 is allowed to flow from a part on it for hardening. However, a shape is predetermined so that the volume % of the piezoelectric ceramic is 30-50%, a gate plate 4 is eliminated, and then electrodes 9a and 9b are provided at both edges of a obtained compound piezoelectric material 8 and then polarization treatment is performed, thus achieving a piezoelectric element 10.</p> |
