| 摘要 |
PURPOSE:To provide the moving device for the bonder which has good bonding precision. CONSTITUTION:This device is provided with a phase and travel direction detecting means 17 which inputs analog signals from the 1st and 2nd photodetecting elements 14 and 15 of an encoder part 10 and outputs a forward/ backward rotation signal for a motor M according to those signals. Therefore, vibration having an amplitude equal to the minimum resolution of the encoder part 10 can be suppressed. |
