| 摘要 |
PURPOSE:To provide a head nozzle fitting hole to a movable body so as to detect the change of a positional relation between a camera integrally built in a movable table and the center of a nozzle. CONSTITUTION:A movable table 1 is driven to position a head 4 above a movable body 32, a nozzle 6 is fitted into a fitting hole 33 provided to the movable body 32, and the fitting hole 33 is observed by a camera 3, whereby a distance between the camera 3 and the nozzle 5 in directions of X and Y is detected. |
