| 摘要 |
PURPOSE:To provide a method for laser treatment which enables treatment portions forbidding direct exposure to a laser and which reduces thermal damages to a workpiece. CONSTITUTION:A metallic film 5 is formed, by a laser assisted CVD method, on one of the inside faces 4 of a channel 3 formed by etching using a first laser beam 1 irradiation. A second laser beam 6 is applied to the metallic film 5 and reflected thereby. The reflected laser beam is used to etch portions externally invisible. |
