Apparatus for coating a substrate, especially with electrically nonconductive coatings

摘要

In the case of a method and an apparatus for coating a substrate (26) with electrically non-conductive layers from an electrically conductive target (25) in a reactive (e.g. oxidative) atmosphere, involving a cathode (17) which is arranged in an evacuable coating chamber (16) and interacts electrically with the target (25), the cathode (17) is connected, so as to suppress arcs, to a DC power supply (21) and can periodically be set, with the aid of a matched additional circuit (22 and 3 to 15), to a positive potential for short periods, the frequency of said periodic polarity reversal being settable depending on the layer to be deposited. <IMAGE>