发明名称 HOLDING UNIT FOR FLAT WORKPIECE
摘要 <p>A holder and carrier for a plurality of holders is constructed to engage the band-like edge of a thin disk-shaped workpiece. The holder comprises a plurality of spring bars which are connected at corners to form a polygon which engages the outer edge of the workpiece. Each corner is held within a slot shaped receptacle which in turn is defined in a frame for holding the workpiece with minimum shadowing and minimum danger of scratches, warping of other disadvantageous effects.</p>
申请公布号 JPH0641743(A) 申请公布日期 1994.02.15
申请号 JP19930061674 申请日期 1993.03.22
申请人 BALZERS AG 发明人 ROMAN SHIERUTORERU
分类号 B25B5/00;B25B11/00;C23C14/50;C23C16/44;C23C16/458;G11B7/26;H01L21/683;H01L21/687;(IPC1-7):C23C14/50;H01L21/68 主分类号 B25B5/00
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