发明名称 Fluid dispersion head
摘要 A fluid distribution head of this invention includes a chamber for fluid flow including a perforated plate. The perforated plate is internally supported by a structural support to avoid deformation of the plate.
申请公布号 US5286519(A) 申请公布日期 1994.02.15
申请号 US19920856476 申请日期 1992.03.24
申请人 LSI LOGIC CORPORATION 发明人 VUKELIC, MICHAEL
分类号 C23C16/455;C30B25/14;(IPC1-7):B05D5/12;C23C16/00 主分类号 C23C16/455
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