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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH0641740(A)
申请公布日期
1994.02.15
申请号
JP19920200771
申请日期
1992.07.28
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
AOKURA ISAMU;YAMANISHI HITOSHI;OKAMOTO TADASHI
分类号
C23C14/35;C23C14/54;(IPC1-7):C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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