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发明名称
SPUTTERING METHOD
摘要
申请公布号
JPH0641732(A)
申请公布日期
1994.02.15
申请号
JP19920197073
申请日期
1992.07.23
申请人
MITSUBISHI KASEI CORP
发明人
WATANABE HIROYUKI;OGAKI MITSUTERU
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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