DEVICE FOR APPLICATION OF PHOTORESIST MATERIAL ON PLATES,申请号SU19894634043-传众专利搜索

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发明名称	DEVICE FOR APPLICATION OF PHOTORESIST MATERIAL ON PLATES
摘要
申请公布号	RU1632286(C)	申请公布日期	1994.02.15
申请号	SU19894634043	申请日期	1989.01.09
申请人	TSKB "KONTAKT"	发明人	SERGEEV A.A.;ABRAMOV A.N.;SERGEEVA V.S.
分类号	B04B5/00;H01L21/312	主分类号	B04B5/00
代理机构		代理人
主权项
地址

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