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发明名称
PROCESS OF FORMATION OF NANOSTRUCTURE
摘要
申请公布号
RU2007783(C1)
申请公布日期
1994.02.15
申请号
SU19915004232
申请日期
1991.10.02
申请人
OVCHINNIKOV BORIS M;OVCHINNIKOV YURIJ B
发明人
OVCHINNIKOV BORIS M;OVCHINNIKOV YURIJ B
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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