| 摘要 |
PURPOSE:To provide a post-curing apparatus capable of performing a preheating process, a final heating process and a cooling process in parallel and directly connected to the mold device of a previous process to make it possible to establish an in-line system. CONSTITUTION:A preheating chamber 4, a final heating chamber 5 and a cooling chamber 6 are formed so as to be shielded by doors 7a, 7b, 7c, 7d and a feed means allowing a magazine 3 having substrates received therein to be intermittently fed in the respective chambers and fed out of said chambers is provided. |
