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发明名称
KANALIAVIMO KAMPO MATAVIMO BUDAS IR IRENGINYS
摘要
申请公布号
LT2477(B)
申请公布日期
1994.02.15
申请号
LTRP1314
申请日期
1993.09.29
申请人
KAUNO TECHNOLOGIJOS UNIVERSITETAS;JONELIUNAS,SIGITAS;PRANEVICIUS,LIUDVIKAS;RAGAUSKAS,ARMINAS
发明人
JONELIUNAS,SIGITAS;PRANEVICIUS,LIUDVIKAS;RAGAUSKAS,ARMINAS
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
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