Device for supporting and linearly moving an object

摘要

A movable member is situated within a cylindrical member so as to be axially movable The movable member is supported by a magnetic bearing device in relation to the cylindrical member in a perfect non-contact manner. The cylindrical member and movable member are provided with an electromagnetic force generating mechanism for selectively applying an axial driving force to the movable member in a non-contact manner. The movable member is provided with an auxiliary plate having an inclined surface inclined with respect to the axis of the movable member. The axial position of the movable member is detected by the output of a detector which detects the distance between itself and the inclined surface. On the basis of the detected axial position and an objective position, the electromagnetic force generating mechanism is activated to set the axial position of the movable member.