发明名称 |
Conveyor for conveying workpieces in a vacuum chamber |
摘要 |
A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and supporting the floating body solely by magnetic forces, and a non-contact driving motor portion for directly reciprocating the floating body. The floating body is directly reciprocated by a linear pulse motor. The linear pulse motor comprises a motor main body and a cog portion, and the motor main body is interposed between a pair of magnetic bearing portions. The cog portion is disposed in a longitudinal or axial direction of the outer peripheral surface of the floating body and coacts with the motor main body to reciprocate the floating body.
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申请公布号 |
US5284411(A) |
申请公布日期 |
1994.02.08 |
申请号 |
US19920851835 |
申请日期 |
1992.03.16 |
申请人 |
SEIKO SEIKI KABUSHIKI KAISHA |
发明人 |
ENOMOTO, YOSHIHIRO;ODA, YOSHIMASA |
分类号 |
B65G54/02;B65G49/07;H01L21/677;H02K7/09;H02K41/02;H02K41/03;(IPC1-7):B65G49/00 |
主分类号 |
B65G54/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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