发明名称 Semiconductor bond pads
摘要 Bond pad lift problems encountered during bonding are alleviated by providing an upper bond pad, a lower bond pad and an insulating component between the upper and lower bond pads. At least one opening is provided through the insulating component, extending from the bottom bond pad to the upper bond pad. The at least one opening is aligned with a peripheral region of the bottom bond pad. Conductive material fills the at least one opening, and electrically connects the top and bottom bond pads. In one embodiment, the at least one opening is a plurality of conductive vias. In another embodiment, the at least one opening is a ring-like opening extending around the peripheral region. In yet another embodiment, the at least one opening is one or more elongated slit-like openings.
申请公布号 US5284797(A) 申请公布日期 1994.02.08
申请号 US19920984206 申请日期 1992.11.30
申请人 LSI LOGIC CORPORATION 发明人 HEIM, DOROTHY A.
分类号 H01L21/60;G03F7/20;H01L23/485;(IPC1-7):H01L21/44 主分类号 H01L21/60
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