MANUFACTURE OF ELASTIC SURFACE WAVE ELEMENT

摘要

PURPOSE:To secure the mass production of the high-quality elastic surface wave element, by removing the photosensitive material through exposure and then forming the elastic surface wave absorber with the residual photosensitive material. CONSTITUTION:Comb-line electrodes 9 and 10 for input/output are provided on substrate 8, and photosensitive material 11 is coated over the entire surface region. Then substrate 8 is exposed to remove materiall 11 on electrodes 9 and 10 as well as the necessary elastic surface wave propagation path. Thus material 11 is left only at the outside of electrodes 9 and 10, and residual material 11 functions as the elastic surface wave absorber to absrob the undesired elastic surface wave sent from electode 9 for input. Then substrate 8 thus obtained is divided along the grids shown by the solid lines, thus obtaining individual elastic surface wave element 12 finally.