| 摘要 |
PURPOSE:To extremely simplify the formation of multiple layers, to enable the sure control of film formation and to improve productivity by executing the film formation by sputtering while relatively moving substrates in the direction orthogonal with a bar-shaped composite target. CONSTITUTION:The bar-shaped targets 13, 15 are fixed and placed on a backing plate 11 adjacently to each other. The bar-shaped targets 13 are formed of a Pt material and the bar-shaped targets 15 of a Co material, thereby constituting the composite target 10. A moving tray 20 has a substrate holder 21 and the substrates 25 and the substrate holder 21 is mounted with plural pieces of the substrates 25 in such a manner that the surfaces of the substrates 25 facing the composite target 10 are exposed. The substrates 25 do not rotate. The moving tray 20 is moved in nearly the direction (arrow H direction) orthogonal with the composite target 10, by which the sputtered films meeting the compsns. of the bar-shaped targets 13, 15 disposed on the composite target 10 are formed on the substrates 25. The recording films consisting of the prescribed multiple layers are thus formed. |
