| 摘要 |
PURPOSE:To enable the charge to respective capacitors to be made even by a method wherein a going charge path is to be connected to the central part of the line of respective discharging capacitors of the title excimer laser system so that the returning charge path may be taken out of both ends of the line. CONSTITUTION:A going charge path 34 is connected to one position on the central part of a line of discharge capacitors 4. Accordingly, one hole suffices for the power supply of the capacitor charge to be provided for a laser chamber 1. The discharge current from a charging capacitor 6 simultaneously runs from the central part of respective discharge capacitors 4 to both ends of both side lines so as to successively charge respective capacitors 4. Thus, the charge for respective discharging capacitors 4 can be made even than the case of the charge from both sides in the jointly provided direction of the line of capacitors 4. Furthermore, the numbers of feedthrough provided in the laser chamber 1 for the power supply to the discharging capacitors 4 can be decreased thereby enabling the leakage and venting of laser gas to be reduced. |
