METHOD FOR ALIGNING GLASS SUBSTRATE

摘要

PURPOSE:To align a + mark B on a glass substrate of a color filter and has a mark line which is flexed for printing a paint to an optimum state for a #mark M on a mask plate. CONSTITUTION:A mask plate 1 and a glass substrate 2 are step-shifted together for exposure devices CCDX and CCDY and the spacing between mark lines B1 and B2 which are flexed by a paint print of a substrate mark B and two sets of parallel two mark lines M1 or M2 (M3 or M4) of the mask mark M corresponding to each of these mark lines is measured by a CCD sensor over the entire range of the mark lines B1 and B2, thus calculating the average value. The traveling distance of the glass substrate 2 for the center of a #mark is obtained from the average value and the glass substrate is shifted, thus aligning the substrate mark B to an optimum state for the mask mark M and hence properly exposing the each picture element of the mask plate for the glass substrate with a position deviation as the minimum.