ELECTRONIC CIRCUIT AND MANUFACTURE THEREOF

摘要

PURPOSE:To stabilize the manufacture of an anode aluminum oxide transistor by grading hierarchically wirings led to a gate electrode wiring according to their width and optimizing the wirings when manufacturing the anode aluminum oxide transistor. CONSTITUTION:When manufacturing an anode aluminum oxide gate transistor, there are installed a trunk wiring 13, which is the widest in size, and a branch wiring 5, which is narrower than the trunk wiring 13 and a gate electrode wiring 6, which is laid out at the end, thereby forming a circuit layout as described above. This wiring layout dramatically inhibits the difference in the development of anode oxidation produced between the gate electrode wirings 6 at the end. The adhesive properties of an anode oxide film of each of the gate electrode wirings 6 show a virtually constant value. This construction makes it possible to use a dry etching process and process the film to a fine degree and enhance yield as well.