发明名称 PROXIMITY MASK ALIGNMENT SYSTEM BY MEANS OF STORED VIDEO IMAGE
摘要 <p>PURPOSE: To precisely set two planar surfaces in a prescribed spatial relation by storing an image with respect to the surface, when the first surface is focused, superimposing the image of the surface on the image on a 'raw' second surface, so as to display it and adjusting the two surfaces by a manual operation. CONSTITUTION: A microscope 14 which can execute focusing remotely and a video frame storage device (a framegrabber) 34 are provided. When a first surface is focused, the microscope 14 stores an image with respect to the first surface in the framegrabber 34. Then, the microscope 14 is focused again on a second surface, and the stored image of the first surface is superimposed on the image of the 'raw' second surface and it is displayed on a monitor 32. An operator aligns the two surfaces by moving the other surface by a manual operation, while observing the two images.</p>
申请公布号 JPH0629173(A) 申请公布日期 1994.02.04
申请号 JP19930017362 申请日期 1993.02.04
申请人 KARL JIYUSU KG PUREECHIJIONZUGEREET FUYUUA BUITSUSENSHIYAFUTO & IND GMBH & CO 发明人 PIITAA ERU DOMENIKARI
分类号 G03F1/08;G03F9/00;H01L21/027;H01L21/30;H01L21/68;H04N7/18;(IPC1-7):H01L21/027 主分类号 G03F1/08
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