LASER SYSTEM, EXPOSURE DEVICE AND EXCIMER LASER

摘要

PURPOSE:To reduce an installation space and a cost of a system by simplifying the system. CONSTITUTION:A laser system has a plurality of lasers 2a-2c necessary for a vacuum evacuation unit for operating a laser oscillator. One vacuum evacuation unit 4 is used commonly for the plurality of the lasers to evacuate the lasers. The evacuations are controlled by communicating with the lasers by a controller.