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发明名称
SURFACE TREATMENT
摘要
申请公布号
JPH0629264(A)
申请公布日期
1994.02.04
申请号
JP19920181435
申请日期
1992.07.09
申请人
TOSHIBA CORP
发明人
NISHINO HIROTAKE;ITO HITOSHI
分类号
H01L21/302;H01L21/205;H01L21/22;H01L21/3065;H01L21/316;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
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