| 发明名称 |
ALIGNMENT METHOD AND SEMICONDUCTOR CHIP HAVING LASER REPAIR TARGET |
| 摘要 |
The semiconductor chip has triangular shape targets for the X-Y scanning alignment and rectangular shape targets for the theta alignment. The triangular shape targets are used for X-Y alignment process, the rectangular shape targets for theta alignment process. The X-Y alignment process simultaneously adjusts X-Y axes reducing alignment processing time.
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| 申请公布号 |
KR940000910(B1) |
申请公布日期 |
1994.02.04 |
| 申请号 |
KR19910005891 |
申请日期 |
1991.04.12 |
| 申请人 |
GOLDSTAR ELECTRON CO., LTD. |
发明人 |
HAN, BYONG - YUL |
| 分类号 |
H01L21/02;H01L21/66;H01L21/68;H01L21/82;H01S3/00;H05K13/04;H05K13/08;(IPC1-7):H01L21/30;H01L21/027 |
主分类号 |
H01L21/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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