摘要 |
PURPOSE:To obtain a developing process equipment capable of preventing generation of imperfect plating, and cleaning at a low cost. CONSTITUTION:A developing equipment 90 for spraying developer 4 on a printed wiring board and eliminating a superflous resist film, and a first rinsing tank 21, a rinsing tank 11 of industrial water, a second rinsing tank 22, a third rinsing tank 23 and a rinsing tank 14 of new water which spay water and wash the developed printed board 3 are arranged in order. Ton exchange water 7 is supplied to the rinsing tank of new water 14. Overflow water 70 of the rinsing tank 14 of new water, the third rinsing tank 23 and a second rinsing tank 22, is introduced in order into forward tanks 5, and is used for washing in each tank 5. Industrial water 6 is introduced to the rinsing tank 11 of industrial water. |