发明名称 DEVELOPING PROCESS EQUIPMENT OF PRINTED WIRING BOARD
摘要 PURPOSE:To obtain a developing process equipment capable of preventing generation of imperfect plating, and cleaning at a low cost. CONSTITUTION:A developing equipment 90 for spraying developer 4 on a printed wiring board and eliminating a superflous resist film, and a first rinsing tank 21, a rinsing tank 11 of industrial water, a second rinsing tank 22, a third rinsing tank 23 and a rinsing tank 14 of new water which spay water and wash the developed printed board 3 are arranged in order. Ton exchange water 7 is supplied to the rinsing tank of new water 14. Overflow water 70 of the rinsing tank 14 of new water, the third rinsing tank 23 and a second rinsing tank 22, is introduced in order into forward tanks 5, and is used for washing in each tank 5. Industrial water 6 is introduced to the rinsing tank 11 of industrial water.
申请公布号 JPH0629642(A) 申请公布日期 1994.02.04
申请号 JP19920207277 申请日期 1992.07.10
申请人 IBIDEN CO LTD 发明人 KODAMA KOZO;KIMATA KENRO
分类号 G03F7/30;H05K3/06;H05K3/18;H05K3/26;(IPC1-7):H05K3/06 主分类号 G03F7/30
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