| 摘要 |
PURPOSE:To regulate an interval between electrodes in accordance with consumption of a discharge part of the electrode and to always hold a discharging width constant by providing moving means for at least one of discharge electrode pair toward the other electrode. CONSTITUTION:A cathode electrode 4c fixed to an insulting member 3 and an anode electrode 4a fixed to a support base 6 are provided in a laser chamber 1 in which medium gas 2 is sealed, and the base 6 is supported to the chamber 1 by a micrometer 7. If discharge parts 5a, 5c of the electrodes 4a, 4c are consumed that an interval (d) of the electrodes is widely varied, the base 6 is displaced in a direction perpendicular to its longitudinal direction by turning a micrometer 7 to move the electrode 4a to the electrode 4c. Thus, the interval (d) of the electrodes is maintained constant, and a laser output and laser efficiency characteristics are stabilized for a long period. |
