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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0629379(A)
申请公布日期
1994.02.04
申请号
JP19910119395
申请日期
1991.04.23
申请人
SONY CORP
发明人
SATO JUNICHI;GOCHO TETSUO
分类号
H01L21/302;H01L21/3065;H01L21/76;(IPC1-7):H01L21/76
主分类号
H01L21/302
代理机构
代理人
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