FLATTENING METHOD OF INTERLAYER INSULATING FILM,申请号JP19920183280-传众专利搜索

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发明名称	FLATTENING METHOD OF INTERLAYER INSULATING FILM
摘要
申请公布号	JPH0629412(A)	申请公布日期	1994.02.04
申请号	JP19920183280	申请日期	1992.07.10
申请人	NEC CORP	发明人	FUKASE TADASHI;KOMURO MASAHIRO
分类号	H01L21/768;(IPC1-7):H01L21/90	主分类号	H01L21/768
代理机构		代理人
主权项
地址

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