| 摘要 |
PURPOSE:To enhance a positional accuracy of an X-ray mask and to obtain a fresh pattern image by providing an X-ray transmitting membrane containing a diamond microcrystal containing conductive impurity and an X-ray absorber provided along a predetermined pattern on the membrane. CONSTITUTION:After a membrane film 6 for transmitting an X-ray is formed on a silicon substrate 1 through an X-ray reflection preventive film 7, an X-ray absorber 3 in which a fine pattern 3a for semiconductor is formed is formed, and a supporting frame 4 having high rigidity is formed. The membrane 6 is formed of a diamond microcrystal in which boron, etc., is added to exhibit conductivity. Thus, since an X-ray mask having the membrane having high rigidity and conductivity is obtained, the fine pattern is not deviated due to influence of a stress, and decreases in a distortion.visibility due to local charge-up can be prevented even at the time of pattern lithography, circuit inspection, X-ray lithography with an electron beam. |
