| 摘要 |
PURPOSE:To set an inspection object area on a sample by deciding a square or a circle without recognizing an outline of a binary image of the sample limited to be square or circle. CONSTITUTION:A square model and a circular model to which an inspection object position is set, are set to the inside in advance, and an image 110 (square model) of the whole sample is binarized on an X-Y coordinate system and an area of one value is extracted as a processing object area, and whether it is a square simple or a circular sample is decided from a relation of its area and peripheral length. In the case of the square sample, at least three points are derived in the maximum and the minimum coordinate values in the X axis direction of the extracted processing object area and the respective Y coordinate values, and the maximum and the minimum coordinate values in the Y axis direction and the respective X coordinate values, and in the case of the circular sample, the maximum and the minimum coordinate values in the X axis direction or the Y axis direction and the respective Y coordinate values or X coordinate values are derived, and by adapting the coordinate of the square model or the circular model, based on them, the inspection object position set in advance is determined. |
