| 摘要 |
PURPOSE:To obtain an exposure apparatus having high accuracy and high throughput when used for the apparatus by accurately deciding a position of an alignment mark even if an alignment mark forming surface is rough, and accurately aligning an element formed with the mark. CONSTITUTION:A high resolution image signal of an alignment mark 7 is obtained by a CCD camera 8, low resolution image of the mark 7 is obtained by a CCD camera 9, a combined and multiplied signal obtained by combining and multiplying the high resolution signal and the low resolution signal of the mark 7 is obtained by imaging means 19, and a position of the mark 7 is decided from the multiplied signal. |
