CHARGED PARTICLE BEAM LITHOGRAPHY,申请号JP19930100063-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM LITHOGRAPHY
摘要
申请公布号	JPH0629197(A)	申请公布日期	1994.02.04
申请号	JP19930100063	申请日期	1993.04.05
申请人	TOSHIBA CORP	发明人	WASHIMI MASAHIKO
分类号	H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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