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发明名称
DEVELOPING AND ETCHING DEVICE AND MANUFACTURE OF PHOTO-MASK
摘要
申请公布号
JPH0629273(A)
申请公布日期
1994.02.04
申请号
JP19920183547
申请日期
1992.07.10
申请人
SEIKO EPSON CORP
发明人
IRIKURA HIDEAKI
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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