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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH0627202(A)
申请公布日期
1994.02.04
申请号
JP19920207357
申请日期
1992.07.10
申请人
HITACHI LTD
发明人
UCHIDA MAKIO
分类号
G01R31/28;H01L21/66;H01L21/82;H01L21/822;H01L27/04;H03K19/173;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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