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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0629515(A)
申请公布日期
1994.02.04
申请号
JP19920180085
申请日期
1992.07.07
申请人
FUJITSU LTD
发明人
TAKAO YOSHIHIRO
分类号
H01L51/05;H01L21/336;H01L29/78;H01L29/786;H01L51/40;(IPC1-7):H01L29/28;H01L29/784
主分类号
H01L51/05
代理机构
代理人
主权项
地址
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