| 摘要 |
PURPOSE:To obtain a highly reliable three dimensional acceleration sensor, which can detect the three dimensional accelerations acting on the same mass point and can be manufactured easily. CONSTITUTION:A three dimensional acceleration sensor has three piezoelectric elements 3, which are arranged in the directions of an axis (x), an axis (y) and an axis (z), a spherical body 2, which is inscribed with three piezoelectric elements 3 and bonded to the corresponding piezoelectric element at a contact point, and a charge detection circuit 8, which is connected to each piezoelectric element 3. |
