| 摘要 |
<p>PURPOSE:To reduce cost of a signal waveform detector for observing an electrical signal waveform at a high speed utilizing an electrooptic effect. CONSTITUTION:This detector allows the terminal voltage of an LSI 5 to be measured to be applied to one surface and at the same time is provided with at least an electrooptic crystal 1 where a transparent conductive film 2 is provided on the other surface and a connection plate 8 for connecting the LSI 5 to be measured and the electrooptic crystal 1 electrically by contacting the electrical optical crystal 1 on one end face and a contact pin 7 through a performance board 4 on the other end face. Then, the connection plate 8 is constituted of a connection plate body 12 with a parallel flat-plate shape consisting of an insulation elastic material and a conductive member 13 which is provided in penetration in the thickness direction of the connection main body 12 and connects one end face to the other end face electrically. Also, a dielectric reflecting film 14 is formed on the entire surface contacting the connection plate 8 of the electrooptic crystal 1.</p> |
