PEDESTAL FOR DRY ETCHING OXIDE FILM,申请号KR1019910003919-传众专利搜索

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发明名称	PEDESTAL FOR DRY ETCHING OXIDE FILM
摘要
申请公布号	KR1019940000914(B1)	申请公布日期	1994.02.04
申请号	KR1019910003919	申请日期	1991.03.12
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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