| 摘要 |
PURPOSE:To improve bondability by reducing the weight of an actuator and an impact load occurring at the time of bonding. CONSTITUTION:A bonding arm 2 with one end thereof holding a capillary 1 is attached to an arm holder 3, and a clamper 10 is attached to a clamper holder 11. The arm holder 3 and the clamper holder 11 are attached to a traveling table 7 by means of a pair of leaf springs 5 and 6 and another pair of leaf springs 12 and 13, respectively, wherein each pair of leaf springs constitutes an individual crossed spring pivot. The arm holder 3 and the clamper holder 11 are forced by springs 26 and 27 in such a way that the holders follow the profile of a linear cam 25. One side of a linear motor 20 is attached to the arm holder 3, and the other side of the motor is attached to the traveling table 7. |
