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发明名称
CHARGED-PARTICLE BEAM LITHOGRAPHY APPARATUS
摘要
申请公布号
JPH0629202(A)
申请公布日期
1994.02.04
申请号
JP19930100094
申请日期
1993.04.05
申请人
TOSHIBA CORP
发明人
WASHIMI MASAHIKO
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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