| 摘要 |
PURPOSE:To provide an optical multiplexer/demultiplexer easy to manufacture, high in wavelength resolution and having less crosstalk between input and output waveguides and its manufacturing method. CONSTITUTION:The optical multiplexer/demultiplexer 101 is manufactured by forming a mask 111 for etching provided with a pattern which covers the upper contours of a concave diffraction grating 107 and the input and output waveguides 108, 109 on the upper part of a flat optical waveguide comprised by stacking a core layer 104 and clad layers 103, 105 on a substrate 102, forming integrally the concave diffraction grating 107 and the input and output waveguides 108, 109 while performing dry etching at almost right angles to the plane of the waveguide up to the bottom of the core layer 104 by using the mask 111 for etching, and coating the end face of the concave diffraction grating formed by the etching with reflecting film 106 after eliminating the mask 111 for etching. |
